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Geophysical and Geochemical Exploration  2015, Vol. 39 Issue (S1): 44-46    DOI: 10.11720/wtyht.2015.S1.10
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Low-rigidity quartz accelerometer's chip machining technology
YU Hong-Yu, ZHU Xue-Yi, LI Li-Yong, YANG Wen
Tianjin Navigation Instrument Research Institute, Tianjin 300131, China
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